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Suzanne K. Polmar

MicroCoating Technologies (formerly CCVD)

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Affiliated Awards

Award Title Agency Phase Award amount Start Date End Date
Amorphous Aluminum Nitride as A New Gate Dielectric in Wide Bandgap MISFETs
MicroCoating Technologies (formerly CCVD)
Principal Investigator
MDA 1 $65K 09/11/00 03/11/01