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Dr. Heng Liu

Emcore Corp.

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Affiliated Awards

Award Title Agency Phase Award amount Start Date End Date
MOCVD Growth and Characterization of Psuedomorphic HEMTs in a High Speed Rotating Disk Reactor
Emcore Corp.
Principal Investigator
AF 2 $699K 08/03/94 08/03/96
Atomic Layer Epitaxy of Gan in a Multi-wafer Rotating Disc Reactor
Emcore Corp.
Principal Investigator
MDA 2 $750K 11/20/93 11/20/95
MOCVD Growth and Characterization of Pseudomorphic HEHT's in a High Speed Rotating Disk Reactor
Emcore Corp.
Principal Investigator
AF 1 $53K 06/17/93 12/17/93
Atomic Layer Epitaxy of GaN in a Multi-Wafer Rotating Disc Reactor
Emcore Corp.
Principal Investigator
MDA 1 $49.9K 08/01/92 02/01/93