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Abbas Emami-Naeini

Integrated Systems, Inc.

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Affiliated Awards

Award Title Agency Phase Award amount Start Date End Date
Modeling for Sensor-Based Semiconductor Process Control
Integrated Systems, Inc.
Principal Investigator
AF 2 $700K 09/20/95 09/09/97
Integration of Large-Scale Simulation and Controls for an RTP Chamber
Integrated Systems, Inc.
Principal Investigator
DARPA 2 $559K 08/31/95 09/07/97
Modeling for Sensor-Based Semiconductor Process Control
Integrated Systems, Inc.
Principal Investigator
AF 1 $59.9K 05/11/94 11/11/94
Integration of Large-Scale Simulation and Controls for an RTP Chamber
Integrated Systems, Inc.
Principal Investigator
DARPA 1 $96.5K 03/31/94 08/31/94