M & D Technology Development Corp.

9 Renfro Road
Somerset, NJ 08873
3 Employees

SBIR Award Summary

Total Number of Awards 1
Total Value of Awards $65K
First Award Date 04/08/98
Most Recent Award Date 04/08/98

Key Personnel

Last Name Name Awards Contact
Liang Shaohua Liang 1

1 Award Won

Phase 1 SBIR

Agency: Missile Defense Agency
Topic: BMDO98-003
Budget: 04/08/98 - 10/07/98

ZnO material is a wide bandgap semiconductor and a piezoelectric material as well. ZnO is compatible with current Si process technology. Large area, high quality ZnO films can be deposited by MOCVD technique on various substrates, such as sapphire and Si at low growth temperature. We propose to develop a new smart sensor technology by integratio...