Microwave Plasma Applications, Inc.

610-614 River Street
Hoboken, NJ 07030
2 Employees

SBIR Award Summary

Total Number of Awards 1
Total Value of Awards $99.2K
First Award Date 09/29/94
Most Recent Award Date 09/29/94

Key Personnel

Last Name Name Awards Contact
Lee Brian Lee 1

1 Award Won

Phase 1 SBIR

Agency: Defense Advanced Research Projects Agency
Topic: SB941-032
Budget: 09/29/94 - 05/11/95
PI: Brian Lee

The objective of Phase I research to demonstrate the feasibility of neutral beam cleaning and etching of unprocessed/processed semiconductor wafers with intense superthermal atomic hydrogen beams. The superthermal hydrogen atoms are produced by electron impact dissociation of hydrogen gas in a dense plasma generated in a novel type of a mi...