Sandia Systems, Inc.

2655 A Pan American Freeway, Ne
Albuquerque, NM 87107
4 Employees

SBIR Award Summary

Total Number of Awards 11
Total Value of Awards $1.24MM
First Award Date 01/01/87
Most Recent Award Date 08/29/94

Key Personnel

Last Name Name Awards Contact
Wilson Scott Wilson 5
Krukar Richard Krukar 2
jacobson Rodney jacobson 2

11 Awards Won

Phase 1 SBIR

Agency: Defense Advanced Research Projects Agency
Topic: SB941-064
Budget: 08/29/94 - 03/31/95

We will demonstrate the capability of scatterometry to provide a process monitor to post exposure bake of chemically amplified photoresist. Two or more scatterometers will be designed that are capable of monitoring the intensities of multiple diffraction orders that result from illuminating device patterns of photoresist. The goal is to d...

Phase 1 SBIR

Agency: Air Force
Topic: AF93-119
Budget: 05/17/93 - 11/17/93

Phase 1 SBIR

Agency: Defense Advanced Research Projects Agency
Topic: DARPA92-193
Budget: 02/01/93 - 09/01/93

Phase 1 SBIR

Agency: National Aeronautics and Space Administration
Topic: 93-1
Budget: 01/01/93 - 12/31/93

Phase 1 SBIR

Agency: Missile Defense Agency
Topic: SDIO92-001
Budget: 06/03/92 - 12/03/92

Phase 1 SBIR

Agency: National Science Foundation
Topic: 1992
Budget: 01/01/92 - 12/31/92

ION BEAM FIGURING TECHNIQUES WILL BE APPLIED TO FIGURE ASPHERE OPTICAL ELEMENTS. A MIRROR WILL BE ASPHERIZED TO REMOVE THE R(0)6 ZERNIKE CONTRIBUTION TO CORRECT FOR THIRD-ORDER AND FIFTH-ORDER SPHERICAL ABBERRATION AND DEFOCUS. IN ADDITION, A PHASE CORRECTION PLATE WITH THE SAME OPTICAL CORRECTION WILL BE INVESTIGATED FOR FABRICATION. SIMULATED ...

Phase 2 SBIR

Agency: National Aeronautics and Space Administration
Topic: 92-2
Budget: 01/01/92 - 12/31/92
PI: Unavailable

IN THIS PROJECT, ION-BEAM-FIGURING TECHNIQUES WILL BE APPLIED TO FIGURE ASPHERIC OPTICAL ELEMENTS. A LENS WILL BE CORRECTED FOR 5TH-ORDER ABERRATIONS AS A DEMONSTRATION. SIMULATED ION-BEAM FIGURING OF MORE COMPLEX ELEMENTS WILL BE PERFORMED TO ILLUSTRATE THE POWER OF THE TECHNIQUE. IN THIS PROJECT, ION-BEAM-FIGURING TECHNIQUES WILL BE APPLIED TO...

Phase 1 SBIR

Agency: National Aeronautics and Space Administration
Topic: 91-1
Budget: 01/01/91 - 12/31/91
PI: Unavailable

Phase 1 SBIR

Agency: Air Force
Topic: AF90-143
Budget: 01/01/90 - 12/31/90

Phase 2 SBIR

Agency: National Science Foundation
Topic: 1989
Budget: 01/01/89 - 12/31/89
PI: Unavailable

PRESENT TECHNIQUES OF EXAMING RECRYSTALLIZED SILICON, INCLUDING SOI MATERIAL, INCLUDE A WET (ACID) ETCH AND EXAMINATION WITH AN OPTICAL MICROSCOPE, X-RAY DIFFRACTION, SEM OR TEM MICROSCOPES. THESE TECHNIQUES ARE SLOW, AND USUALLY THE SAMPLE IS DESTROYED. SANDIA SYSTEMS PROPOSES INVESTIGATING ANGLE-RESOLVED LIGHT SCATTER TECHNIQUES AS A METHOD TO...

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