M3 Technologies, Inc.

921 Main Street
Monroe, CT 06468
74 Employees

SBIR Award Summary

Total Number of Awards 2
Total Value of Awards $839K
First Award Date 01/14/99
Most Recent Award Date 02/28/00

Key Personnel

Last Name Name Awards Contact
Aghajanian Michael Aghajanian 2

2 Awards Won

Phase 2 SBIR

Agency: Defense Advanced Research Projects Agency
Topic: SB982-012
Budget: 02/28/00 - 05/31/02

A Phase II SBIR program is proposed that will construct a high performance lithography stage structure from an advanced Al-Si/SiC composite material that displays high levels of mechanical and thermal stability. The stage design, which was generated during a Phase I program, contains many innovative features, such as integral laser mirrors for ...

Phase 1 SBIR

Agency: Defense Advanced Research Projects Agency
Topic: SB982-012
Budget: 01/14/99 - 09/24/99

Novel stages for step and scan photolithography machine tools will be designed in this Phase I SBIR program. To achieve performance levels required in next generation machines, the stages will be designed from advanced composite materials. Five major steps will exist in the work plan. First, the dimensional and performance requirements for ne...