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SBIR Award Summary

Total Number of Awards 1
Total Value of Awards $681K
First Award Date 04/01/98
Most Recent Award Date 04/01/98

Key Personnel

Last Name Name Awards Contact
Ciplickas Dennis Ciplickas 1

1 Award Won

Phase 2 SBIR

Agency: Defense Advanced Research Projects Agency
Topic: SB961-031
Budget: 04/01/98 - 07/01/00

To ensure the profitability of US semiconductor manufacturers, and a reliable supply of integrated circuits (ICs) to the US military, this SBIR identifies and attacks software and modeling issues presented by two major sources of design-dependent process variation: chemical mechanical polishing (CMP) and photolithographic pattern printing. A...