Digital Instruments, Inc.

520 East Montecito Street
Santa Barbara, CA 93103
40 Employees

SBIR Award Summary

Total Number of Awards 3
Total Value of Awards $403K
First Award Date 09/09/91
Most Recent Award Date 01/01/96

Key Personnel

Last Name Name Awards Contact
Elings Dr. Virgil Elings 3

3 Awards Won

Phase 1 SBIR

Agency: Department of Commerce
Topic: 1996
Budget: 01/01/96 - 12/31/96

This project will complete the design and fabrication of a novel high-resolution termal microprobe, and evaluate its potential for measuring the temperature of operating microelectronic components with a temperature resolution of 0.01 C and a spatial resolution of 10 nm. Fabrication is in two major steps: formation of a prototype AFM microprob...

Phase 2 SBIR

Agency: Air Force
Topic: AF91-040
Budget: 09/30/92 - 09/30/94

a. Objective: The objective of this project is to apply the techniques of Scanning Probe Microscopy (SPM) to Nanometric Surface Preparation (NSP) of silicon for electro-optical applications. SPM methods will be applied to characterize the state of the prepared surface and to provide feedback and control at very high rates during surface prepa...

Phase 1 SBIR

Agency: Air Force
Topic: AF91-040
Budget: 09/09/91 - 03/09/92