Superior Vacuum Technology, Inc.

7620 EXECUTIVE DRIVE
Eden Prairie, MN 55344
20 Employees

SBIR Award Summary

Total Number of Awards 9
Total Value of Awards $1.06MM
First Award Date 04/30/91
Most Recent Award Date 08/09/93

Key Personnel

Last Name Name Awards Contact
Chow Dr. Peter P. Chow 8
Hove James Van Hove 1

9 Awards Won

Phase 1 SBIR

Agency: Missile Defense Agency
Topic: SDIO93-014
Budget: 08/09/93 - 02/09/94

Phase 2 SBIR

Agency: Air Force
Topic: AF92-112
Budget: 08/03/93 - 02/03/95

For high temperature III-V compounds electronics good p- and n-type dopants are needed. Carbon and tellurium are considered promising candidates. We propose to investigate in detail MBE dopant sources for the two species. The program will be based on our Phase I effort which demonstrated that controllable carbon and tellurium fluxes can be ac...

Phase 1 SBIR

Agency: Air Force
Topic: AF93-019
Budget: 06/28/93 - 12/28/93

Phase 1 SBIR

Agency: Missile Defense Agency
Topic: SDIO93-003
Budget: 05/26/93 - 11/26/93

Phase 2 SBIR

Agency: Air Force
Topic: AF91-097
Budget: 09/10/92 - 09/10/94

Molecular Beam Epitaxy (MBE) has become the preferred epitaxial growth technique in research environments because of its ability to achieve atomic level control over device structures. To be a highly reliable and reproducible manufacturing process, however, the entire growth sequence must be automated to coordinate and interprete sensor signals...

Phase 1 SBIR

Agency: Air Force
Topic: AF92-135
Budget: 05/15/92 - 11/15/92

Phase 1 SBIR

Agency: Air Force
Topic: AF92-112
Budget: 04/08/92 - 10/08/92

Phase 1 SBIR

Agency: Defense Advanced Research Projects Agency
Topic: SB911-060
Budget: 08/14/91 - 02/14/92

Phase 1 SBIR

Agency: Air Force
Topic: AF91-097
Budget: 04/30/91 - 10/30/91