Cymer Laser Technologies

7887 DUNBROOK ROAD, SUITE H
San Diego, CA 92126
60 Employees

SBIR Award Summary

Total Number of Awards 2
Total Value of Awards $392K
First Award Date 01/27/92
Most Recent Award Date 07/27/93

Key Personnel

Last Name Name Awards Contact
Das Palash Das 1
Sandstrom Richard Sandstrom 1

2 Awards Won

Phase 2 SBIR

Agency: Defense Advanced Research Projects Agency
Topic: SB912-112
Budget: 07/27/93 - 01/31/94

The objective of this effort is to develop and test a high performance production-worthy 193 nm ArF excimer laser illumination source for a projection scanning type lithography system that will be used for printing sub -0.25 um design rule features for the next generation of I.C. devices. Specifically, this laser will meet the requirements...

Phase 1 SBIR

Agency: Defense Advanced Research Projects Agency
Topic: SB912-112
Budget: 01/27/92 - 07/31/92