Applied Science & Technology, Inc.

35 Cabot Road
Woburn, MA 01801
90 Employees

SBIR Award Summary

Total Number of Awards 10
Total Value of Awards $1.69MM
First Award Date 09/20/89
Most Recent Award Date 07/01/95

Key Personnel

Last Name Name Awards Contact
Post Richard Post 2
Sevillano Evelio Sevillano 4
Lane Barton Lane 1
Bourget Lawrence Bourget 2
Tarrh John M. Tarrh 1
Post Richard S Post 1

10 Awards Won

Phase 2 SBIR

Agency: Defense Advanced Research Projects Agency
Topic: SB912-097
Budget: 07/01/95 - 01/10/97

Diamond films on devices are an excellent candidate for dissipation of self-generated thermal loads in integrated circuits and multichip modules. In fact, due to the potential advantages of incorpoarting diamond film deposition as another step in semiconductor manufacturing, a low temperature deposition process on completed devices is extremely...

Phase 1 STTR

Institution: Boston University

Agency: Navy
Topic: N94T002
Budget: 09/30/94 - 09/29/95

ASTeX and Boston University propose to develop a process for deposition of gallium nitride (GaN) for high temperature and high power electronic devices using a new mini-MBE system designed around an optimized plasma source. This new system will provide controllable low energy ion flux to the substrate, a high flux of reactive nitrogen, and a we...

Phase 1 SBIR

Agency: Defense Advanced Research Projects Agency
Topic: SB941-032
Budget: 07/21/94 - 02/20/95

Electron Cyclotron Resonance (ECR) plasma technology is widely used in the etching of III-V semiconductor devices. This has enabledthe fabrication of a wide variety of high speed analog, digital, and optoelectronic devices. As the need grows for high performance devices with dimensions below 0.1 microns, the technological requirements on ...

Phase 1 SBIR

Agency: Air Force
Topic: AF93-149
Budget: 05/20/93 - 11/20/93

Phase 1 SBIR

Agency: Defense Advanced Research Projects Agency
Topic: DARPA92-044
Budget: 06/24/92 - 12/28/92

Phase 2 SBIR

Agency: Defense Advanced Research Projects Agency
Topic: SB901-026
Budget: 02/11/92 - 03/01/93

IN TOPIC 90-026, DARPA IDENTIFIED THE NEED FOR MATHEMATICAL MODELLING OF FLUID FLOW IN PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION (PECVD) REACTORS. HIGH QUALITY COMPUTER MODELLING OF THE FLUID DYNAMICS OF THERMAL CHEMICAL VAPOR DEPOSITION (CVD) REACTORS HAS BEEN ESTABLISHED FOR SILICON DEPOSITION IN ROTATING DISC REACTORS. THE ADDITION OF PLASM...

Phase 1 SBIR

Agency: Defense Advanced Research Projects Agency
Topic: SB912-097
Budget: 02/05/92 - 08/05/92

Phase 1 SBIR

Agency: Navy
Topic: N91-258
Budget: 09/24/91 - 03/24/91

Phase 1 SBIR

Agency: Defense Advanced Research Projects Agency
Topic: SB901-026
Budget: 01/01/90 - 12/31/90

Phase 1 SBIR

Agency: Department of Health & Human Services
Topic:
Budget: 09/20/89 - 03/31/90

This proposal will examine the potential technical and economic benefits of surface treatment of orthopedic devices using Plasma Source Ion Implantation, or PSII, a new and innovative approach to ion implantation, recently demonstrated by Prof. John R. Conrad at the University of Wisconsin. The program will assess the technical and economic bene...

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