Jetek, Inc.

54 Danbury Road
Ridgefield, CT 06877
3 Employees

SBIR Award Summary

Total Number of Awards 2
Total Value of Awards $849K
First Award Date 06/21/00
Most Recent Award Date 05/20/02

Key Personnel

Last Name Name Awards Contact
Bollinger Dr. L.David Bollinger 1 Message
Bollinger Dr. L. David Bollinger 1 Message

2 Awards Won

Phase 2 SBIR

Agency: Defense Advanced Research Projects Agency
Topic: SB001-026
Budget: 05/20/02 - 07/17/03

The ITRS 2000 defined Rapid Thermal Processing (RTP) with very low thermal budget as a barrier with no known solutions below the 70nm node. Solutions must be found to enable very shallow, very high conductivity single crystal structures in silicon and non-silicon materials. In a Phase I contract, JETEK assessed the feasibility of a revolutiona...

Phase 1 SBIR

Agency: Defense Advanced Research Projects Agency
Topic: SB001-026
Budget: 06/21/00 - 02/19/01

Technical AbstractWe propose an exploratory development program to demonstrate the feasibility of a novel Atmospheric Rapid Thermal Processing (ARTP) concept to provide very rapid, spike-like, temperature rise and cool-down times. Initial studies show the concept meets the Rapid Thermal Process requirements of the 11/99 International Technology ...