Piezomax Technologies, Inc.

1006 Starlight Drive
Madison, WI 53711
http://www.piezomax.com
10 Employees

SBIR Award Summary

Total Number of Awards 7
Total Value of Awards $1.95MM
First Award Date 10/20/97
Most Recent Award Date 05/10/02

Key Personnel

Last Name Name Awards Contact
Moloni Dr. Katerina Moloni 2 Message
MacKay James F. MacKay 3
O'Brien William O'Brien 2

7 Awards Won

Phase 1 SBIR

Agency: Missile Defense Agency
Topic: BMDO02-016
Budget: 05/10/02 - 11/15/02

A critical need is developing for precision nanopositioners that are very compact and very fast while maintaining reasonable range of motion and load carrying capability. The need is pervasive, cover-ing, for example, advanced forms of lithography and CD metrology in the semiconductor industry; positioning of optical fibers, lasers, and electron...

Phase 2 SBIR

Agency: Defense Advanced Research Projects Agency
Topic: SB991-005
Budget: 08/16/00 - 08/31/02

As the dimensions of integrated circuits shrink, surface and critical-dimension metrology become increasingly difficult. Yet the need for high yield, which defines the continued profitability of the industry, demands tools capable of sufficiently high resolution and speed to meet these metrology needs. The only option is a tool that incorporat...

Phase 1 SBIR

Agency: Missile Defense Agency
Topic: BMDO99-013
Budget: 08/01/99 - 02/01/00

A need exists to increase the speed, acceleration, positioning accuracy, and in particular range of motion of precision motion stages, while maintaining load carrying capability. The need is pervasive, covering, for example, lithography and metrology in the semiconductor industry, precision machining in the optical lens and magnetic storage medi...

Phase 1 SBIR

Agency: Defense Advanced Research Projects Agency
Topic: SB991-005
Budget: 05/12/99 - 01/17/00

As the critical dimensions in transistors shrink, they become increasingly difficult to fabricate. High yield and hence adequate yield analysis define the continued success of the industry, with metrology an essential aspect of yield analysis. Surface metrology needs for current devices are barely being met, particularly in terms of resolution...

Phase 2 SBIR

Agency: Defense Advanced Research Projects Agency
Topic: SB972-057
Budget: 11/10/98 - 01/29/01

This Small Business Innovation Research Phase II project will fully develop a high-speed actively damped controller and piezoelectric actuator that forms the critical component of the sensor head of a new, fast, high-resolution profilometer. The head consists of the actuator, high-bandwidth sensor, and a probe. The resulting profiler will hav...

Phase 2 SBIR

Agency: Navy
Topic: N96-176
Budget: 05/01/98 - 04/30/00

This Small Business Innovation Research Phase II project will fully develop a high-speed, active-damping-feedback controller for piezoelectric positioners and develop an actively damped precision machining tool for CNC lathes to improve dimensioning and the machined-surface finish. The Phase I feasibility study on which this Phase II proposal is...

Phase 1 SBIR

Agency: Defense Advanced Research Projects Agency
Topic: SB972-057
Budget: 10/20/97 - 06/10/98