NewPath Research L.L.C.

2880 S. Main Street, Suite 214 Array
Salt Lake City, UT 84115

SBIR Award Summary

Total Number of Awards 1
Total Value of Awards $225K
First Award Date 01/15/17
Most Recent Award Date 01/15/17

Key Personnel

Last Name Name Awards Contact
Hagmann Mark J Hagmann 2 Message

1 Award Won

Phase 1 STTR

Institution: Los Alamos National Laboratory

Agency: National Science Foundation
Topic: MI
Budget: 01/15/17 - 12/31/17

This Small Business Technology Transfer Phase I project will develop advanced tools for semiconductor metrology that are essential for high accuracy at finer resolution as progress continues to the finer lithography nodes. This progress is essential to satisfy the demand for greater performance in numerous consumer products as well as many other...