XUV Lasers

942 Driftwood Dr
Fort Collins, CO 80525

SBIR Award Summary

Total Number of Awards 1
Total Value of Awards $150K
First Award Date 01/01/13
Most Recent Award Date 01/01/13

Key Personnel

Last Name Name Awards Contact
Menoni Carmen S. Menoni 2 Message

1 Award Won

Phase 1 SBIR

Agency: National Science Foundation
Topic: NM-2012
Budget: 01/01/13 - 12/31/13

This Small Business Innovation Research Phase I project will develop a compact, table top, high-throughput nano-photolithography tool capable to print arrays of periodic features of arbitrary shape with sub-50 nm feature size defect-free. The innovative printing tool makes use of the Talbot effect, in which a coherently illuminated periodic diff...