Araca, Inc.

2550 E River Rd, Suite 12204
Tucson, AZ 85718

SBIR Award Summary

Total Number of Awards 2
Total Value of Awards $650K
First Award Date 01/01/11
Most Recent Award Date 01/01/12

Key Personnel

Last Name Name Awards Contact
Zhuang Yun Zhuang 3 Message

2 Awards Won

Phase 2 SBIR

Agency: National Science Foundation
Topic: NM-2012
Budget: 01/01/12 - 12/31/12

This Small Business Innovation Research (SBIR) Phase II project aims to develop a novel slurry injection device for applications in chemical mechanical planarization (CMP), a key technology for integrated circuit (IC) manufacturing. Different from the current slurry application method that applies slurry on the pad center area during wafer polis...

Phase 1 SBIR

Agency: National Science Foundation
Topic: NM-2010
Budget: 01/01/11 - 12/31/11

This Small Business Innovation Research (SBIR) Phase I project will develop and implement a novel slurry injection device for applications in chemical mechanical planarization (CMP), a key-enabling technology for integrated circuit (IC) manufacturing. In the most current CMP commercial polishers, the slurry is injected on the pad center area dur...