Tamar Technology

996 Lawrence Drive, Suite 202
Newbury Park, CA 91320

SBIR Award Summary

Total Number of Awards 2
Total Value of Awards $599K
First Award Date 01/01/07
Most Recent Award Date 01/01/08

Key Personnel

Last Name Name Awards Contact
Marx David S. Marx 2 Message

2 Awards Won

Phase 2 SBIR

Agency: National Science Foundation
Topic: 2008
Budget: 01/01/08 - 12/31/08

The Small Business Innovation Research (SBIR) Phase II project will design and construct prototype measurement systems based on near infrared (NIR) chromatic confocal sensor technology. Silicon is transparent in the NIR, and thus the sensor measures the distance to the front and back surfaces of the wafer simultaneously. The sensor will measur...

Phase 1 SBIR

Agency: National Science Foundation
Topic: 2007
Budget: 01/01/07 - 12/31/07

The Small Business Innovation Research (SBIR) Phase I project will develop a novel infrared measurement technique for determining the thickness of ultra-thin (0 to 200 microns) and patterned silicon wafers, and the depth of etched features (maximum trench depth of 150 microns) in micro electro-mechanical systems (MEMS). The proposed instrument...