Hyperion Scientific, Inc.

455 Science Drive, Suite 140
Madison, WI 53711

SBIR Award Summary

Total Number of Awards 1
Total Value of Awards $500K
First Award Date 01/01/07
Most Recent Award Date 01/01/07

Key Personnel

Last Name Name Awards Contact
MacFarlane Joseph J. MacFarlane 1 Message

1 Award Won

Phase 2 SBIR

Agency: National Science Foundation
Topic: 2007
Budget: 01/01/07 - 12/31/07

The Small Business Innovation Research (SBIR) Phase II project will pursue the development of novel plasma technologies for creating highly efficient, short-wavelength radiation sources for use in next-generation semiconductor chip manufacturing. The development of radiation sources that efficiently emit light at wavelengths near 13.5 nm is cru...