Atomic Precision Systems Inc.

301 Rosemont Drive
Santa Clara, CA 95051

SBIR Award Summary

Total Number of Awards 2
Total Value of Awards $600K
First Award Date 01/01/07
Most Recent Award Date 01/01/08

Key Personnel

Last Name Name Awards Contact
Gadgil Prasad N. Gadgil 2 Message

2 Awards Won

Phase 2 SBIR

Agency: National Science Foundation
Topic: 2008
Budget: 01/01/08 - 12/31/08

The Small Business Innovation Research (SBIR) Phase II project will develop a novel high-speed Atomic Layer Deposition technology comprising an ALD reactor and associated thin film processes for GaN thin films required for fabrication of high-brightness Light Emitting Diode (HBLED). The proposed effort is based on successful demonstration of op...

Phase 1 SBIR

Agency: National Science Foundation
Topic: 2007
Budget: 01/01/07 - 12/31/07

This Small Business Innovation Research Phase I project proposes to develop a high-speed and flexible prototype Atomic Layer Deposition (ALD) system suitable for its adaptation to an in-situ precursor generation and a plasma source to develop novel Gallium Nitride (GaN) thin film processes for fabrication of high efficiency and High-Brightness L...