6235 Robin Ridge Court
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SBIR Award Summary

Total Number of Awards 1
Total Value of Awards $100K
First Award Date 01/01/06
Most Recent Award Date 01/01/06

Key Personnel

Last Name Name Awards Contact
Pirogova Rimma A. Pirogova 1 Message
Arora Narain D. Arora 1 Message

1 Award Won

Phase 1 SBIR

Agency: National Science Foundation
Topic: 2006
Budget: 01/01/06 - 12/31/06

This Small Business Innovation Research Phase I project will develop a theoretical and experimental proof-of-concept, along with instrumentation and technique, for non-contact, in-line resistance measurement of nanostructures (transistors, interconnects, contacts, via, etc.), required to improve the process yield of today's integrated circuit (I...