3350 Scott Blvd
Santa Clara, CA 95054

SBIR Award Summary

Total Number of Awards 1
Total Value of Awards $99.9K
First Award Date 01/01/06
Most Recent Award Date 01/01/06

Key Personnel

Last Name Name Awards Contact
Selker Mark D. Selker 1 Message

1 Award Won

Phase 1 SBIR

Agency: National Science Foundation
Topic: 2006
Budget: 01/01/06 - 12/31/06

This Small Business Innovation Research (SBIR) Phase I project will yield highly sensitive photoacoustic spectroscopy (PAS) systems to serve as monitors for the semiconductor industry. Moisture in semiconductor process gases can distort manufacturing processes and thereby compromise device performance. No candidate technologies for moisture moni...