TimeDomain CVD Inc

4432 Enterprise Street, Suite 1
Fremont, CA 94538

SBIR Award Summary

Total Number of Awards 5
Total Value of Awards $491K
First Award Date 01/01/99
Most Recent Award Date 01/01/09

Key Personnel

Last Name Name Awards Contact
Dobkin Daniel Dobkin 2 Message
Selitser Simon I. Selitser 4 Message

5 Awards Won

Phase 1 SBIR

Agency: National Science Foundation
Topic: 2009
Budget: 01/01/09 - 12/31/09

This Small Business Innovation Research (SBIR) Phase I project will develop a novel approach to through-wafer via formation in silicon. Vertical stacking of MEMS and CMOS devices is becoming increasingly popular for increasing functional density, and for combining specialized microelectromechanical systems (MEMS) with standard silicon integrated...

Phase 1 SBIR

Agency: National Science Foundation
Topic: 2008
Budget: 01/01/08 - 12/31/08

This Small Business Innovation research Phase I project will demonstrate the feasibility of producing low k dielectrics with a nanoporous and nanolaminated structure. The project will demonstrate the feasibility of deposition of low-k porous silica and flourosilicate stacks, using atmospheric-pressure thermal plasma treatment of nanoscale silica...

Phase 1 SBIR

Agency: National Science Foundation
Topic: 2006
Budget: 01/01/06 - 12/31/06
PI: Unavailable

This Small Business Innovation Research (SBIR) Phase I project proposes to demonstrate the feasibility of a novel approach to molecular-layer film deposition. Atomic Layer

$99.4K

Not Available

Phase 1 SBIR

Agency: National Science Foundation
Topic: 2000
Budget: 01/01/00 - 12/31/00

Phase 1 SBIR

Agency: National Science Foundation
Topic: 1999
Budget: 01/01/99 - 12/31/99