MicroTherm, LLC

2404 East Hennepin Avenue
Minneapolis, MN 55413

SBIR Award Summary

Total Number of Awards 1
Total Value of Awards $49.9K
First Award Date 01/01/97
Most Recent Award Date 01/01/97

Key Personnel

Last Name Name Awards Contact
Rao Dr. Nagaraja Rao 1

1 Award Won

Phase 1 SBIR

Agency: Department of Commerce
Topic: 1997
Budget: 01/01/97 - 12/31/97

The Small Business Innovation Research Phase 1 project will improve the practical utility of a new approach for detecting and sizing sub-0.1 m particles in vacuum processes used in semiconductor manufacturing. Particle contamination during the processing of silicon wafers is a major source of yield loss in semiconductor manufacturing. Current ge...