Ade Corp.

77 Rowe Street
Newton, MA 02166

SBIR Award Summary

Total Number of Awards 2
Total Value of Awards $248K
First Award Date 01/01/95
Most Recent Award Date 01/01/96

Key Personnel

Last Name Name Awards Contact
Stoyer John Stoyer 2

2 Awards Won

Phase 2 SBIR

Agency: Department of Commerce
Topic: 1996
Budget: 01/01/96 - 12/31/96

Light scatter has been used to map and size particles on silicon wafers for many years, producing accurate maps of particle position and giving an indication of particle size, but do not reveal any information about particle composition. Today's technology is limited by noise, precluding detection of the smallest particles of interest. Present...

Phase 1 SBIR

Agency: Department of Commerce
Topic: 1995
Budget: 01/01/95 - 12/31/95