Abek Inc.

815 North Wooten Road
Colorado Springs, CO 80915

SBIR Award Summary

Total Number of Awards 1
Total Value of Awards $40K
First Award Date 01/01/84
Most Recent Award Date 01/01/84

Key Personnel

Last Name Name Awards Contact
diiorio Salvatore p. diiorio 1

1 Award Won

Phase 1 SBIR

Agency: National Science Foundation
Topic: 1984
Budget: 01/01/84 - 12/31/84

BY OPTIMIZING CONDITIONS, CONVENTIONAL ELECTRON BEAM BY OPTIMIZING CONDITIONS, CONVENTIONAL ELECTRON BEAM RESISTS, SUCH AS PBS, CAN BE USED TO PRODUCE GEOMETRIES IN THE 0.3 TO 0.5 MICRON RANGE IN A CONTROLLED MANNER, USING RASTER SCAN WRITING TECHNIQUES IN A LIMITED PRODUCTION ENVIRONMENT. IN ORDER FOR THESE PATTERNING TECHNIQUES TO BE USEFUL, T...