Improved Thermal Management by High Growth Rate Diamond Layers

Period of Performance: 08/14/2003 - 02/10/2004


Phase 1 SBIR

Recipient Firm

SVT Assoc., Inc.
7620 Executive Drive
Eden Prairie, MN 55344
Principal Investigator


This Phase I project addresses the development of a process for the thermal management of semiconductor devices with diamond films grown by hot filament chemical vapor deposition (HFCVD). Thermal management of electronic and optical devices is one of the most critical areas for high power applications. Due to its unmatched thermal conductivity diamond is the ideal candidate. Currently HFCVD diamond growth is