Magnetic Sensors for Inertial Measurement

Period of Performance: 12/10/2003 - 06/09/2004


Phase 1 SBIR

Recipient Firm

NVE Corp. (formerly Nonvolatile Electron
11409 Valley View Rd.
Eden Prairie, MN 55441
Principal Investigator


The Phase I effort is to determine the feasibility of a novel micro-magnetofluidic multi-axis inertial measurement device for sensitive measurement of linear and angular acceleration. The proposed device uses on-chip micro-magnetofluidic channels with integrated giant magnetoresistance (GMR) sensors. The channels can be precisely patterned using standard microelectronics technology. The GMR sensors have advantages of high-resolution, small dimensions, low cost, low power, temperature compensation, and intrinsic shock resistance. Different sensing modes and ranges of measurements are possible with the proper choice of magnetic particles and suspension fluids. The proximity of the sensor to the magnetically-tagged inertial mass, and the ability to densely pattern GMR sensors, should be ideal for achieving high sensitivity. The inertial sensor proposed here may be more shock resistant and thermally stable than the micro-electromechanical (MEMS) suspended structures used in commercially available accelerometers.