Novel Temperature and Vibration Tolerant Packaging for Inertial Sensors (MEMS)

Period of Performance: 06/25/2012 - 04/26/2013


Phase 1 STTR

Recipient Firm

ePack, Inc.
600 S. Wagner Road, Suite 10 Array
Ann Arbor, MI 48103
Principal Investigator
Firm POC

Research Institution

University of Michigan
3003 South State Street
Ann Arbor, MI 48109
Institution POC


The objective of the proposal is to demonstrate the feasibility of a generic package that provides high vacuum, temperature control and vibration isolation for a wide range of high performance (tactical and navigation grade) micromachined inertial sensors. Inertial sensors (accelerometers and gyroscopes) are now widely used in consumer and industrial applications. However, for high performance navigation and targeting applications there are several packaging challenges which act as roadblocks to their commercialization including: i) their need for low vacuum pressures (