Flexible Micro- and Nano-Patterning Tools for Photonics

Period of Performance: 06/01/2011 - 12/01/2011


Phase 1 STTR

Recipient Firm

Luminit, LLC
1850 W. 205th Street Array
Torrance, CA 90501
Principal Investigator
Firm POC

Research Institution

University of Michigan
3003 South State Street
Ann Arbor, MI 48109
Institution POC


To address the OSD needs for low cost, highly flexible micro- and nano-patterning tools, systems, and methods with excellent durability for multilevel nanophotonic devices and/or dense photonic and optoelectronic components, Luminit, LLC proposes to develop a new computer-controlled Nano-Pattering Tool (NAPA-Tool) to replicate micro- and nano-patterns (sub-100 nm to 100 micron) on both rigid and flexible substrates. This flexible net-shape tooling can be integrated into existing roll-to-roll replication web machines for mass production of photonic devices, with multi-cavities and has controllable surface roughness with very good release properties with a short lead time thereby reducing the manufacturing cost. In Phase I, Luminit will design a NAPA-Tool by replicating micro- and nano-pattern, for example, waveguide structures on both rigid and flexible substrate and testing them for quality of the replication process using the NAPA-Tool, such as morphology and optical transmission. In Phase II, we will optimize the NAPA-Tool, scale-up the fabrication process of metal master, produce prototype samples and perform a cost benefit analysis.