High Resistivity VOx for Continuous Bias Read-outs

Period of Performance: 11/25/2009 - 05/26/2010


Phase 1 SBIR

Recipient Firm

Lake Shore Cryotronics, Inc.
575 McCorkle Blvd.
Westerville, OH 43082
Principal Investigator


This SBIR Phase I proposal addresses improvements in the sensitivity and signal to noise ratio in uncooled infrared imaging sensors based on vanadium oxides. A novel, spin-on process for the deposition of metal oxides will be used to produce higher resistivity and temperature coefficient of resistance than other processes now produce. This will increase the sensitivity to higher than 2% of resistivity/(degree C) and the sheet resistance to higher than 10Mohm per square. This will allow continuous bias read out and smaller pixel sizes.