Micro-Discharge Arrays

Period of Performance: 08/23/2000 - 08/22/2001


Phase 1 STTR

Recipient Firm

Ewing Technology Assoc., Inc.
5416 143rd Ave SE
Bellevue, WA 98006
Principal Investigator

Research Institution

University of Illinois, Urbana-Champaign
600 S Mathews
Urbana, IL 61801
Institution POC


This effort will develop micro-discharge arrays as novel UV light sources. These sources can be made by semi-conductor processing techniques. However we need to research the optimum excitation methods and fabrication techniques for highly parallel structures. In Phase I we focus on quantitative comparison of the electric power input and optical power output for a single emitter micro-discharge and a modestly scaled array, ~ 25 parallel emitters. Our long-term goal is developing arrays with 1000's of these sources run in parallel and inexpensively produced. We will examine the circuits needed to assure equal power sharing between emitters. Pure DC excitation with ballast, pulsed DC, and AC circuits will be tested. For the pulsed approaches we will vary the pump pulse duration and effective power loading in both the single emitter and the array. Our Phase I focus is on one prototype system, XeI in the UV, both as a potential, environmentally benign, light source to replace Hg based lamps, and also as a prototype for very deep UV emitting source that could be used in materials processing. Issues related to materials and fabrication processes for more reactive species will be defined for study in Phase II. The effort will focus on developing novel light sources for replacement of Hg lamps and for material processing. The parallel device technology will enable a range of other applications including chemical processing, large area high intensity displays, novel laser sources, diagnostics, and optical computing and storage.