Batch-capable Polylithic Integration

Period of Performance: 12/17/1998 - 08/30/1999

$99K

Phase 1 SBIR

Recipient Firm

Microassembly Technologies, Inc.
3065 Richmond ParkwaySuite 109
Richmond, CA 94806
Principal Investigator

Research Topics

Abstract

The objective of this proposal is to demonstrate a generic batch-capable technique for polylithic integration of multiple technologies onto one substrate.