Ultra-Thin Metal Barriers for Advanced Interconnects

Period of Performance: 04/22/1998 - 10/21/1998

$65K

Phase 1 SBIR

Recipient Firm

Genus, Inc.
1139 Karlstad Drive
Sunnyvale, CA 94089
Principal Investigator

Research Topics

Abstract

The SIA National Technology Roadmap for Semiconductors (NTRS) has defined a need for ultra-thin (