A High Fidelity Simulation Environment for Thermo-Fluid-Mechanical Design of MEMS

Period of Performance: 05/01/1997 - 04/30/1998


Phase 2 SBIR

Recipient Firm

CFD Research Corp.
701 McMillian Way NW Suite D
Huntsville, AL 35806
Principal Investigator


The Phase I study has demonstrated the feasibility of using high-fidelity simulation software for multi-disciplinary prototyping and design of MEMS. The strongly integrated fluid-thermal-structures-dynamics solvers showed excellent agreement with experimental data. The software was also used for solving practical MEMS problems (Redwood, IC Sensors) which, to the proposers' knowledge, has never been attempted before. A novel implicit (simultaneous) solution method for stiffly coupled fluid-structures will allow CFDRC to offer a revolutionary automated design software tool for multi-scale/multi-disciplinary design of MEMS. The Phase II effort will focus on enhancements, validation and consolidation of solver modules, on development of MEMS specific GUI and on software qualification for practical design problems. Several innovations proposed in the project such as unstructured, solution-adaptive grids, all element meshes (including polyhedra), automated meshing based on Parametric Constructive Solid Geometry (PCSG), etc., will "springboard" the code beyond all existing competition as well as recently attempted initiatives. Commercial viability will be ensured by maintaining close collaboration with EG&G/IC Sensors, Redwood Microsystems, Northrop Grumman, David Sarnoff and others.