In-situ Diagnostics for Deposition of High T Superconducting Films

Period of Performance: 11/21/1989 - 12/31/1991

$292K

Phase 2 SBIR

Recipient Firm

Advanced Fuel Research, Inc.
87 Church Street
East Hartford, CT 06108
Principal Investigator

Abstract

A prototype in-situ instrument for real time depositon diagnostics is being built and tested. It uses Fourier Transform infrared spectroscopy (FT-IR) to determine: substrate temperature, phase changes, film thickness, water contamination, trends in oxygen content, grain size, and both ambient gas concentration and temperature. In addition to its use for high temperature superconductor depositon, the instrument has application in other deposition and coating processes and annealing reactors. It can be used to improve process quality control, lower production costs, and aid the research in new materials.