Manufacturing Cost Reduction of El Display Etching and Deposition Technology

Period of Performance: 03/10/1992 - 03/10/1994

$496K

Phase 2 SBIR

Recipient Firm

Planar Systems, Inc.
1400 NW COMPTON DRIVE
Beaverton, OR 97006
Principal Investigator

Abstract

THE PROGRAM WILL DEVELOP METHODS IDENTIFIED IN PHASE I TO REDUCE THE MANUFACTURING COST OF FULL COLOR ELECTROLUMINESCENT DISPLAYS. CHEMICAL VAPOR DEPOSITION EQUIPMENT FOR BUILDING PROTOTYPE EL PANELS WILL BE INSTALLED AND PROCESSES QUALIFIED FOR MAKING INSULATING FILMS. SIMPLIFIED ETCH PROCESSING AND AN ALTERNATE STRUCTURE WILL BE EVALUATED AND QUALIFIED FOR FABRICATING MULTICOLOR DISPLAYS TO TEST PERFORMANCE AND RELIABILITY. A PILOT DEPOSITION SYSTEM FOR INSULATORS AND PHOSPHORS WILL BE QUALIFIED AND USED TO ESTABLISH COST REDUCTION BENEFITS WITH LARGER BATCH PROCESSING IN PHASE III. ANTICIPATED BENEFITS/POTENTIAL COMMERCIAL APPLICATIONS - DECREASE THE COST OF PROCESSING FULL COLOR TFEL DISPLAYS, WHICH IS A FLAT PANEL DISPLAY TECHNOLOGY THAT MEETS ALL MILITARY SPECIFICATIONS AND HAS OUTSTANDING PERFORMANCE FOR COMMERCIAL APPLICATIONS.