High Temperature High Resolution in-situ Differential Pressure Sensor

Period of Performance: 08/31/2017 - 08/30/2019


Phase 2 SBIR

Recipient Firm

Innoveering, LLC
100 Remington Blvd Array
Ronkonkoma, NY 11779
Firm POC, Principal Investigator


Chemical manufacturers require high accuracy/high sensitivity pressure sensors to efficiently monitor the various manufacturing systems and processes in the chemical plant, to ensure any changes proceed in a safe and reliable manner, adhering to expected standards and practices. NIST also has a need for highly accurate pressure measurements, especially determining the thermo-physical properties of fluids. Such measurements must be made at the highest standard possible since they affect the development of theoretical models utilized by industry. Since the market is currently limited in the availability of such pressure sensors, i.e. possessing a combination of high accuracy/high temperature capability with excellent accuracy, NIST is seeking a high temperature, in situ, pressure sensor that can achieve better performance than the current state-of-the-art. The Innoveering team will build upon it’s PhI work, which showed promising results for its an innovative, compact High Temperature High Resolution (HTHR) in-situ differential pressure (DP) sensor utilizing piezo-resistive elements to sense differential pressure as well as an over-pressure protection feature to ensure reliable and safe operation. Our team brings together experts in the design/fabrication/testing and application of harsh environment pressure sensors, MEMS microfabrication techniques as well as packaging/welding techniques for these types of high pressure high temperature sensors