Quasi-cw Excimer Laser

Period of Performance: 01/01/1988 - 12/31/1988

$500K

Phase 2 SBIR

Recipient Firm

Potomac Photonics, Inc.
4445 Nicole Drive
Lanham, MD 20706
Principal Investigator

Abstract

DEVELOPMENT OF A NEW QUASI-CW WAVEGUIDE EXCIMER LASER IS PROPOSED. THE PROPOSED DEVICE WOULD BE A COMPACT SELF-CONTAINED SOURCE OF PULSED ULTRAVIOLET RADIATION AT WAVELENGTHS OF 308 nm, 249 nm, AND 193 nm. PULSE REPETITION RATE EXCEEDING 100 kHz AND PULSE DURATIONN GREATER THAN 200 ns WILL PROVIDE OPTICAL DUTY FACTORS OF SEVERAL PERCENT. ADVANCED METHODS FOR FABRICATION OF THE LASER DISCHARGE TUBE WILL BE INVESTIGATED WITH THE GOAL OF ACHIEVING LOW OPTICAL LOSS AND SEALED-OFF OPERATION. THE LASER WILL BE EXCITED BY A SOLID STATE MICROWAVE SOURCE AND UTILIZE A COMPACT POWER SUPPLY OF ADVANCED DESIGN.