Compact Integrated Silicon Nitride Microresonator Accelerometer

Period of Performance: 07/02/2013 - 01/02/2014

$100K

Phase 1 STTR

Recipient Firm

Applied Optronics
2008 Eastpark Blvd
Cranbury, NJ 08512
Principal Investigator, Firm POC

Research Institution

Cornell University
426 Phillips Hall
Ithaca, NY 14853
Institution POC

Abstract

To solve the DARPA need for high-performance MEMS-based optomechanical accelerometers, Applied Optronics proposes to develop a Compact Integrated Silicon Nitride Microresonator Accelerometer (OPTIMA), which is based on a combination of a high-Q silicon ni