Micro-discharge Arrays; Phase II

Period of Performance: 06/28/2002 - 06/28/2004


Phase 2 STTR

Recipient Firm

Ewing Technology Assoc., Inc.
5416 143rd Ave SE
Bellevue, WA 98006
Principal Investigator

Research Institution

University of Illinois, Urbana-Champaign
600 S Mathews
Urbana, IL 61801
Institution POC


This STTR Phase II activity will further develop arrays of micro-discharges and build 3 distinct UV lamp prototypes. Based on our Phase I results where we have succeeded in scaling from ~10 micro-discharges in parallel to 900 emitters on a common chip, we will build novel lamps for germicidal, diagnostic and processing applications. The arrays will be fabricated using semiconductor processing methods in silicon. We will both scale the emitter packing density up for large area arrays and examine the optical focusing properties of the arrays.