SBIR Phase I: Atmospheric Pressure Molecular Layer CVD

Period of Performance: 01/01/2006 - 12/31/2006

$99.9K

Phase 1 SBIR

Recipient Firm

TimeDomain CVD Inc
4432 Enterprise Street, Suite 1
Fremont, CA 94538
Firm POC

Abstract

This Small Business Innovation Research (SBIR) Phase I project proposes to demonstrate the feasibility of a novel approach to molecular-layer film deposition. Atomic Layer