SiCN High Temperature Microelectromechanical Systems (MEMS) Sensor Suite

Period of Performance: 01/01/2003 - 12/31/2003


Phase 1 SBIR

Recipient Firm

Sporian Microsystems, Inc.
515 Courtney Way Suite B
Lafayette, CO 80026
Principal Investigator


72422B03-I SiC- and Si3N4-based ceramic MEMS sensors are among the few types of high temperature sensors, currently under development, that can be utilized for the direct measurement of pressure and temperature distributions in the combustion chamber of turbine engines or other high temperature environments. SiCN MEMS sensors present excellent mechanical properties, electric stabilities, and processing compatibility, as well as low cost for the high temperature application. This project will develop a SiCN MEMS sensor suite, including pressure and temperature sensors, for high temperature applications. Phase I will evaluate existing high temperature pressure and temperature sensor techniques, investigate SiCN electric properties to 1500¿C, determine the feasibility of fabricating the SiCN sensor, complete the structural design for the sensor, and analyze performance. Commercial Applications and Other Benefits as described by awardee: The SiCN high temperature MEMS sensor suite should provide the ¿in-service¿ data required for experiment and control in high temperature applications, and should be highly desired in the energy, space and military industries for electricity generation, atomic reaction, tubing engine, rocket motor, raw material processing, etc.