SBIR Phase I: In Line Thin Film Battery (Cathode) Plasma Enhanced-Metal Organic Chemical Vapor Deposition (PE-MOCVD) Production Tool

Period of Performance: 01/01/2003 - 12/31/2003


Phase 1 SBIR

Recipient Firm

Structured Materials Industries
201 Circle Drive North Unit # 102
Piscataway, NJ 08854
Principal Investigator


This Small Business Innovation Research Phase I project will demonstrate proof of concepts of a next generation plasma-enhanced low temperature in-line linear PE-MOCVD (Web coating) system for thin film batteries. The requisite thin film battery technology exists and prototyping of the same on a polymer substrate has begun. Presently, the major limitation is the ability to effectively manufacture the solid-state cathode. Present efforts have shown a low temperature PE-CVD approach to be the best; however, no such tool meeting all the needs exists today. In defined steps, a prototype of the needed tool will be made, which will be sold commercially.