Enhanced Moly Silicide Intermetallic Alloys

Period of Performance: 01/01/2001 - 12/31/2001


Phase 1 SBIR

Recipient Firm

Structured Materials Industries
201 Circle Drive North Unit # 102
Piscataway, NJ 08854
Principal Investigator


65398 A Metal Organic Chemical Vapor Deposition (MOCVD) process for producing yttrium-barium-copper-oxide (YBCO) cuprate thick films, used in high temperature superconductivity applications, was developed in previous work. However, real time in situ feedback monitors, to address the quality of the actual film as it is being deposited are still needed. This project will develop a real time in situ Spectral Ellipsometry film analysis tool that can continuously measure film thickness composition and texture, deduce electrical/superconductivity properties, and provide feedback into a process control system for coating tapes with YBCO or other materials. Specifically, the developed technology will monitor thickness, composition, and surface/interface morphology. Phase I will develop ex situ sample-data libraries (calibrated to physical measurements) and refine the tool design. Commercial Applications And Other Benefits as described by awardee: The instrument should enhance MOCVD production of superconducting wires (tape), and enable greater system yield. Manufacturers should desire this instrument as part of their production process.