CAPABILITY

Period of Performance: 01/01/1984 - 12/31/1984

$50K

Phase 1 SBIR

Recipient Firm

Ues, Inc.
4401 Dayton-Xenia Road Array
Dayton, OH 45432
Principal Investigator

Abstract

IMPROVED PERFORMANCE CAPABILITY WOULD RESULT FROM INSTRUMENTS UTILIZING WINDOWS WITH BOTH HIGH TRANSMISSION AND BROAD BAND CHARACTERISTICS. A SINGLE LAYER ANTI-REFLECTIVE FILM HAS THE IMPORTANT CHARACTERISTIC OF IMPROVING THE TRANSMISSION OF THE SUBSTRATE AT ALL WAVELENGTHS EVEN THOUGH IT DOES NOT HAVE THE EXTREME TRANSMISSION CAPABILITY OF MULTILAYER FILMS AT ANY ONE WAVELENGTH. DEVELOPMENT OF AN INHOMOGENEOUS SINGLE LAYER FILM WILL RETAIN THE BROAD BAND FEATURE AND IMPROVE THE TRANSMISSION OF THE SUBSTRATE OVER THE SIMPLE SINGLE LAYER FILM. OXIDATION OF A SILICON SUBSTRATE PRODUCING ANTI-REFLECTING FILMS ON BOTH SIDES MEETS THE REQUIREMENT OF BROAD BAND TRANSMISSION WITH EXTREMELY HIGH RESISTANCE TO DAMAGE FROM LASERS OR HIGH ENERGY RADIATION. THE INHOMOGENEOUS ANTI-REFLECTING FILM MAY BE CREATED USING CONTROLLED ION IMPLANTATION OF SILICON OR OXYGEN ATOMS. A SILICON WINDOW CONSTRUCTED IN SUCH A MANNER WILL SERVE AS A HIGH TRANSMISSION WINDOW AND A FILTER FOR WAVELENGTHS LESS THAN ONE MICRON. THIS WINDOW WOULD BE HIGHLY RESISTANT TO DAMAGE FROM RADIATION INCREASING THE LIFETIME OF INSTRUMENTS IN CORROSIVE ATMOSPHERES AND HIGH INTENSITY ELECTROMAGNETIC FIELDS.