Removing Mid-Spatial Frequency Errors with VIBE

Period of Performance: 01/01/2010 - 12/31/2010

$100K

Phase 1 SBIR

Recipient Firm

Optimax Systems, Inc.
6367 Dean Parkway Array
Ontario, NY 14519
Principal Investigator
Firm POC

Abstract

The Optimax VIBE process is a full-aperture, conformal polishing process incorporating high frequency motion that rapidly removes sub-surface damage in a VIBE pre-polish step and eliminates mid-spatial frequency (MSF) errors created by deterministic polishing in a VIBE finishing step. This Phase I feasibility study will focus on the VIBE finishing step to remove undesirable MSF errors while at the same time maintaining the desired low spatial frequency form accuracy.