Miniature Solid-State Sulfur Oxide Sensor for Emissions Measurement

Period of Performance: 01/01/2004 - 12/31/2004


Phase 1 SBIR

Recipient Firm

Makel Engineering, Inc.
1585 Marauder St. Array
Chico, CA 95973
Principal Investigator
Firm POC


Makel Engineering Incorporated (MEI) and Case Western Reserve University (CWRU) propose to develop a MEMS based, minature solid state sulfur oxide sensor for use in emission measurements. The result of this effort will be a compact, robust means of SOx monitoring in high temperature gas emission streams has not been developed previously. The proposed system is based on previous research on advanced micro-machined gas detection sensors developed for sensitivity to other gaseous components (e.g. CO2, O2, NOx).