Miniature Solid-State Sulfur Oxide Sensor for Emissions Measurement

Period of Performance: 01/01/2004 - 12/31/2004

$69.8K

Phase 1 SBIR

Recipient Firm

Makel Engineering, Inc.
1585 Marauder St. Array
Chico, CA 95973
Principal Investigator
Firm POC

Abstract

Makel Engineering Incorporated (MEI) and Case Western Reserve University (CWRU) propose to develop a MEMS based, minature solid state sulfur oxide sensor for use in emission measurements. The result of this effort will be a compact, robust means of SOx monitoring in high temperature gas emission streams has not been developed previously. The proposed system is based on previous research on advanced micro-machined gas detection sensors developed for sensitivity to other gaseous components (e.g. CO2, O2, NOx).