High-Resolution, Low-Taper Excimer-Laser Machining of Thick Materials

Period of Performance: 01/01/1994 - 12/31/1994


Phase 1 SBIR

Recipient Firm

Resonetics, Inc.
4 BUD WAY, #21
Nashua, NH 03063
Principal Investigator


Excimer lasers have been used commercially in manufacturing environments for only about four years. Their utility lies in the short wavelength and high resolution of the output, making it possible to realize both high resolution features and high aspect ratios, with very precise control over the machining process. An optimization of process parameters is needed, however, before many potential commercial applications can be realized. The goal of this program is to completely investigate all of the necessary parameters affecting the ability to use the excimer laser to develop high aspect ratio, low taper angle, high resolution features in metals as applied to NASA's current need for high energy radiation collimators. Also, we will deliver representative samples to prove the concept, necessary for Phase II continuation, under which we will fabricate the end product based on Phase I studies. It is anticipated that this study will have great benefit for commercialization of other materials processing applications.